ALCVDAtomic Layer Chemical Vapor Deposition
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Trikon is now able to offer ALCVD, the most advanced ultra thin film conformal deposition technology for all applications including barrier layers for next-generation applications beyond Physical Vapor Deposition (PVD) and Chemical Vapor Deposition (CVD) technologies.
Trikon has already begun to ship its Soft Sputter Etch modules for integration onto ASM's ALCVD cluster tools," continued Mr.
By integrating ASM's ALCVD modules with Trikon's PVD and sputter etch technologies our cluster tools will provide advanced functionality for the most advanced applications.