ALCVDAtomic Layer Chemical Vapor Deposition
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The IMEC system thus provides the opportunity to evaluate and compare CVD silicon nitride based gate dielectrics and ALCVD high-k gate dielectrics.
ALCVD is the next logical development in ASM's core business.
We are sure that in this case ASM International will create a most suitable environment where Microchemistry can develop its revolutionary ALCVD equipment and process technology.
Trikon has already begun to ship its Soft Sputter Etch modules for integration onto ASM's ALCVD cluster tools," continued Mr.
By integrating ASM's ALCVD modules with Trikon's PVD and sputter etch technologies our cluster tools will provide advanced functionality for the most advanced applications.