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We anticipate that the
advanced technology in this prober, such as active vibration control,
will continue to provide performance advantages for our current and
future applications. 5,660,255 (dealing with the technology incorporated in TMC's
STACIS(R) active vibration control product) (the "Patent"),
that the Patent is valid and enforceable, and that IDE has infringed the
Patent by offering an infringing product for sale. Integrated Dynamics Engineering (IDE), a global leader in the
design and production of vibration isolation systems for semiconductor
lithography and metrology applications has unveiled MaxAktiv(tm), a
comprehensive new family of active vibration control systems featuring
both feedback and feedforward technologies that virtually eliminate
vibration in X-Y moving stages. |
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