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ALN |
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Unlike the
case involving titanium nitride where there was no water available for
reaction, aluminum nitride also can react with water from the sand mold
to produce both nitrogen and hydrogen. Key statement: A heat transfer material comprised of a polymeric
material, aluminum nitride, boron nitride, silicon nitride, aluminum
oxide or beryllium oxide. 35 micron node devices including ionized PVD
liners for Tungsten (W)-Plug, very thick, flowed Al for power devices as
well as highly uniform Aluminum Nitride (AlN) for BAW devices and Thin
Film Heads. |
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