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ALD |
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In the deposition industry, advances in separation by implantation of oxygen (SIMOX), atomic layer deposition (ALD) for advanced nodes, and plasma source ion implantation (PSII) are expected for meeting the specific needs of sub-100 nm devices. Second Place ($1500) - Measurement and control of nanoamp level currents in the formation of nanoscale device electrodes (spacing in the 1-10nm range) using atomic layer deposition by Rahul Gupta of the University of Delaware (Newark). Aviza offers both front-end-of-line (FEOL) and back-end-of-line (BEOL) process applications including products for atomic layer deposition (ALD), diffusion and low pressure chemical vapor deposition (LPCVD) furnaces, atmospheric pressure CVD (APCVD), CVD, etch and physical vapor deposition (PVD). |
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