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BEOL

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BEOLBack-End-of-Line (electronics)
BEOLBent's Old Fort National Historic Site (US National Park Service)
BEOLBent's Old Fort National Historic Site (La Junta, Colorado)


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Papers are in sections on SiO2 removal and drying, surface chemistry of Si and Ge, FEOL selective wet etching and corrosion, FEOL photo-resist removal and substrate loss, particle removal and damage, contamination control, metrology, post-CMP cleaning, and BEOL and contact cleaning.
This system will be integrated into the fabrication of 32nm BEOL copper/low-k interconnects and be used in 22nm development activities MINNEAPOLIS -- FSI International, Inc.
The FEOL and BEOL contributions cover the surface chemistry of silicon and related semiconductors such as SiGe and Ge, cleaning as related to new gate stacks, cleaning at the interconnect level, resist strip and polymer removal, cleaning and contamination control for various new materials and cleaning after chemical-mechanical-polishing (CMP).
 
 
 
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