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BPSG

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AcronymDefinition
BPSGBoron-Doped Phosphosilicate Glass


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? References in periodicals archive
The recent switch in dielectric films from FSG (Flourosilicated Glass) and BPSG (Boron Phosphorous Silicated Glass) to OSG (Organosilicated Glass) has brought this issue to the forefront.
TEL Announces Major Improvements in Plasma Etch Chamber Design That ... by Business Wire
We were impressed with Ultimus' ability to fully leverage Microsoft Office InfoPath, Microsoft Office SharePoint Portal Server, and the rest of the Office System within its Ultimus Solution Packs to ensure immediate ROI resulting from workflow efficiencies for our customers," said Robin Seiler BPSG Partner Solutions Manager at Microsoft.
Ultimus Wins Microsoft Office Solution Builder Program Award by Business Wire
Other applications for the MBF include thermal nitridation, high-k annealing, BPSG reflow and densification, and thermal CVD.
WaferMasters Introduces Industry's First Low-Cost Mini Batch Furnace ... by Business Wire
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