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BPSG

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AcronymDefinition
BPSGBoron-Doped Phosphosilicate Glass
BPSGBaan Process Solutions Group (Invensys; UK)


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? References in periodicals archive
The recent switch in dielectric films from FSG (Flourosilicated Glass) and BPSG (Boron Phosphorous Silicated Glass) to OSG (Organosilicated Glass) has brought this issue to the forefront.
We were impressed with Ultimus' ability to fully leverage Microsoft Office InfoPath, Microsoft Office SharePoint Portal Server, and the rest of the Office System within its Ultimus Solution Packs to ensure immediate ROI resulting from workflow efficiencies for our customers," said Robin Seiler BPSG Partner Solutions Manager at Microsoft.
Other applications for the MBF include thermal nitridation, high-k annealing, BPSG reflow and densification, and thermal CVD.
 
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