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CD-SEM images of linewidth test patterns were analyzed to determine the lines' widths and the angles of their edges. Brion and HHT, the world's largest supplier of scanning electron microscopes for critical dimension (CD) measurement, are working with a joint customer, a large semiconductor manufacturer, to develop a common interface that works with Brion's Tachyon[TM] lithography simulation and design inspection tool and HHT's new DesignGauge CD-SEM system. This CD-SEM incorporates a "beam condition" monitor that provides numerical and graphical descriptions of the condition of the instrument and documents the instruments condition over time. |
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