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CD-SEM

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AcronymDefinition
CD-SEMCritical Dimension - Scanning Electron Microscopy


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CD-SEM images of linewidth test patterns were analyzed to determine the lines' widths and the angles of their edges.
The VeraSEM is the industry's first metrology SEM that extends the capabilities of a conventional CD-SEM system well beyond critical dimensional (CD) measurement to provide monitoring of a variety of challenging process parameters.
We have pushed the performance of our OCD solutions into process control regimes not attainable by CD-SEM or other methods.
 
 
 
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