3 Slag C Slag D Fluxing with FLUX A CaF2
Flux in slag 20.
c) six (6) pieces of CaF2
Optical Window 25 x 2 mm of UQG Ltd, d) 1 (one) piece subsystem 80Spec-Grazing Angle Specular Reflectance for Thin Films (code 012-11CHCH) of Pike Technologies Inc.
The problem of intrinsic birefringence of CaF2
, as reported by NIST in May 2001 (study sponsored by International SEMATECH), has been solved by using a combination of lens elements made from 111 and 100 crystals, resulting in negligible net birefringence effects.
CAF1 recycles an average 100,000 gallons daily, and CAF2
an average 65,000 gallons
We have our new Optron CaF2
lens material plant and tool manufacturing capacity for 600 units per year in place, ready for capacity orders to start to build," said Mr.
Among the inspected fluorite samples, the highest CaF2
content reached 98.
The same issue of SubMicron Focus reports that the projection optics design for Canon's FPA-5800FS1 scanner system will have an innovative catadioptric design that uses less CaF2
optical material in its projection system, to further reduce the effect of IBR in sub-100nm lithography.
1999) Thermodynamic study on the effect of CaF2
on the nitrogen and carbon solubility in the CaO-[Al.
The estimated Proved Ore Reserve is 818 kt with an average CaF2
grade of 60.
During the session, John Burnett of NIST reviewed and updated his characterization of the intrinsic birefringence in CaF2
, ORA presented its plans to update CODE V(R), and Hinds Instruments presented plans to develop a birefringence measurement instrument; all of these efforts have been sponsored by International SEMATECH, to help the industry understand and manage the birefringence issue.
In an effort to better meet the increasing challenges facing the company's chipmaking customers, Canon is building the world's largest CaF2
plant, Optron, to secure its own supply of this valuable lens material for its new 193nm (ArF) and future 157nm (F2) tools and is investing aggressively into its EUV and F2 research and development programs.
As a result of this high spectral bandwidth performance, high numerical aperture (NA) lens designs require fewer calcium fluoride (CaF2
) elements -- an important advantage given the current limited availability and high cost of CaF2