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C-AFM
(redirected from Calibrated Atomic Force Microscope)

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AcronymDefinition
C-AFMCalibrated Atomic Force Microscope
C-AFMConductive Atomic Force Microscopy
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The NIST Calibrated Atomic Force Microscope (C-AFM) has laser displacement interferometers on each of its x and y axes and a laser-interferometer-calibrated capacitance gauge on its z axis, for calibration of nanometer-scale step-height, pitch, and roughness standards [24].
Length and dimensional measurements at NIST by Swyt, Dennis A. / Journal of Research of the National Institute of Standards and Technology
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