DUV laser picosecond class is different, such as the widespread YAG laser or green laser short pulses for fine processing, since a short wavelength, increasing the fineness in the processing by reducing the focused diameter it can, the minimum processing diameter 50?
In addition, DUV laser because the light energy is large, and it displays a high level of processing capability contrast to the glass material and a variety of compound semiconductor materials processing has been difficult in laser processing.
Lot 14 - DUV reticle ASM5500 4X / 5X 300 + reticles for ASM100,
Lot 15 - 4X ASM5500 DUV reticle / crosshairs 300 + 5X + for 1X masks ASM100 - 9 inches,
Lot 16 - DUV reticle ASM5500 4X / 5X reticle 300 + for 1X masks ASM100 + - + 9 inches DUV reticle ASM5500 4X / 1100
The Applied UVision SP system's DUV
laser inspection technology provides a unique advantage in detecting immersion lithography-related defects.
Olympus systems can integrate 248 nanometer DUV
optics with a broad range of visible light imaging methods to increase the resolution limit of standard optical inspection to 80 nanometers.