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DRIE
(redirected from Deep Reactive Ion Etching)

   Also found in: Wikipedia 0.01 sec.
AcronymDefinition
DRIEDisability Rent Increase Exemption (est. 2005; New York)
DRIEDrinking-Related Internal-External (scale)
DRIEData Recovery Information Exchange (Canada)
DRIEDepartment of Regional Industrial Expansion (Canadian)
DRIEDeep Reactive Ion Etching
DRIEDismantling Racism Institute for Educators (National Conference for Community and Justice)


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Lead project researcher Aleksander Angelov says the molds are made of silicon using standard micro-machining techniques including electron-beam lithography and deep reactive ion etching.
A silicon mold insert with micro-holes array is first fabricated by conventional photolithography and deep reactive ion etching process.
The move completes the transition associated with Tegal's acquisition of the Deep Reactive Ion Etching (DRIE) products and related intellectual property for 3D packaging and MEMS devices from France-based Alcatel Micro Machining Systems (AMMS) and Alcatel Lucent.
 
 
 
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