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DRIE

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AcronymDefinition
DRIEDisability Rent Increase Exemption (est. 2005; New York)
DRIEDrinking-Related Internal-External (scale)
DRIEData Recovery Information Exchange (Canada)
DRIEDepartment of Regional Industrial Expansion (Canadian)
DRIEDeep Reactive Ion Etching
DRIEDismantling Racism Institute for Educators (National Conference for Community and Justice)


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Second Quarter Highlights * During the quarter, the Company launched ProNova[TM], a third-generation high-density Inductively Coupled Plasma (ICP) reactor for Tegal DRIE Series Wafer Processing Products.
3D Integration with TSV for MEMS is likely to be the next relay of growth for DRIE market and 3D TSV is pushing the need for quicker etch rate (towards the 100/min
Tegal Corporation, (Nasdaq:TGAL) an innovator of specialized production solutions for the fabrication of advanced MEMS, power ICs and optoelectronic devices, today announced that its full process portfolio for silicon DRIE applications has been made available for the new ProNova ICP source.
 
 
 
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