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EFEM

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AcronymDefinition
EFEMEquipment Front End Module
EFEMEuropean Federation for Experimental Morphology


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? References in periodicals archive
Nasdaq:ASYT), a leading provider of integrated automation solutions that enhance semiconductor and flat panel display manufacturing productivity, announced today that it has shipped its 100th Spartan EFEM (equipment front-end module).
Asyst(R) Ships 100th Spartan(R) EFEM; Sees Continued Growth in Demand ... by Business Wire
Bookings of two of the company's key new products, the Spartan[TM] sorter and Spartan EFEM (Equipment Front-End Module), collectively doubled quarter-over-quarter.
Asyst Reports Full Results for First Quarter of Fiscal 2007 by Business Wire
Bookings of two of the company's key new products, the Spartan(TM) sorter and Spartan EFEM (Equipment Front-End Module), collectively doubled quarter-over-quarter.
Asyst Technologies Reports Sales and Bookings for First Quarter of ... by Business Wire
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