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The partners will provide timely mask capabilities in support of EUV lithography insertion. The NIST/DARPA EUV Reflectometry Facility consists of three parts: the Synchrotron Ultraviolet Radiation Facility (SURF III) [3] storage ring, which provides continuum EUV radiation; the monochromator; and the reflectometer sample chamber. StressPly[R] EUV Mineral with Starburst[TM] Mineral Surfacing, an energy-saving modified bitumen roofing system, combines the superior tensile (700 lbs. |
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