EUVL

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Acronym	Definition
EUVL	Extreme-Ultraviolet Lithography

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? References in periodicals archive
We have commissioned an EUV reflectometer that is capable of measuring the largest optics of the [beta]-generation of EUVL steppers. Towards high accuracy reflectometry for extreme-ultraviolet ... by Lucatorto, Thomas B. / Journal of Research of the National Institute of Standards and Technology March 1: Status and path to a final EUVL reticle protection and handling solution, with Long He, Kevin Orvek, Phil Seidel, and Stefan Wurm SEMATECH to Demonstrate EUV Leadership, Technical Breakthroughs at ... by Business Wire Drawing together the best and brightest in EUVL research from around Europe and beyond, this project has been responsible for important research that will help EUVL technology be introduced for volume semiconductor production around the end of this decade. "More Moore" Shows European EUV Innovation at EUV 2006 in Barcelona by Business Wire More results

? References in periodicals archive

We have commissioned an EUV reflectometer that is capable of measuring the largest optics of the [beta]-generation of EUVL steppers.

Towards high accuracy reflectometry for extreme-ultraviolet ... by Lucatorto, Thomas B. / Journal of Research of the National Institute of Standards and Technology

March 1: Status and path to a final EUVL reticle protection and handling solution, with Long He, Kevin Orvek, Phil Seidel, and Stefan Wurm

SEMATECH to Demonstrate EUV Leadership, Technical Breakthroughs at ... by Business Wire

Drawing together the best and brightest in EUVL research from around Europe and beyond, this project has been responsible for important research that will help EUVL technology be introduced for volume semiconductor production around the end of this decade.

"More Moore" Shows European EUV Innovation at EUV 2006 in Barcelona by Business Wire

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EUV-SH
EUVA
EUVAC
EUVE
EUVI
EUVID
EUVITA
EUVL
EUVP
EUVRP
EUW
EUWAX
EUWB
EUWD
EUWG

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