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We have commissioned an EUV reflectometer that is capable of measuring the largest optics of the [beta]-generation of EUVL steppers. March 1: Status and path to a final EUVL reticle protection and handling solution, with Long He, Kevin Orvek, Phil Seidel, and Stefan Wurm Drawing together the best and brightest in EUVL research from around Europe and beyond, this project has been responsible for important research that will help EUVL technology be introduced for volume semiconductor production around the end of this decade. |
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