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EM |
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system MSSP also ensures stringent electromigration (EM), dielectric breakdown, and line-to-line leakage requirements are met, according to Novellus. calculations performed by him and his doctoral student Tarek Ragab have proved that higher current density in carbon nanotubes does not lead to electromigration and thermomigration. Specific topics discussed include gate dielectrics, the hot carrier effect, electromigration, negative bias temperature instability, plasma process-induced damage, and reliability of high-k gate dielectrics. |
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