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FDSOI |
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This combination of FDSOI and nickel-silicide metal gates has the effect of straining the silicon lattice within the electrical path to enhance carrier mobility. Crolles2: Comparative Scalability of PVD and CVD TiN on HfO2 as a Metal Gate stack for FDSOI cMOSFETs Down to 25-nm Gate Length and Width (IEDM Session 23. This combination of FDSOI and nickel-silicide metal gates has the effect of straining the silicon lattice within the electrical path to enhance carrier mobility. |
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