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FEOL

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AcronymDefinition
FEOLFront End Of Line (semiconductor manufacturing)


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Papers are in sections on SiO2 removal and drying, surface chemistry of Si and Ge, FEOL selective wet etching and corrosion, FEOL photo-resist removal and substrate loss, particle removal and damage, contamination control, metrology, post-CMP cleaning, and BEOL and contact cleaning.
This technology has allowed ST to convert from its use of conventional piranha-based chemistry to the more benign DIO3 chemistry in almost all FEOL resist stripping and post-ash residue removal steps, nearly eliminating the use of sulfuric acid (H2SO4) and significantly reducing the use of hydrogen peroxide (H2O2).
Concurrently, a major Korean customer is evaluating the FSI ORION system for FEOL applications, including our patented ViPR[TM]+ technology that is being utilized to remove highly implanted photoresist with a unique one-step process," continued Mitchell.
 
 
 
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