FEOL

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Acronym	Definition
FEOL	Front End Of Line (semiconductor manufacturing)

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? References in periodicals archive
This technology has allowed ST to convert from its use of conventional piranha-based chemistry to the more benign DIO3 chemistry in almost all FEOL resist stripping and post-ash residue removal steps, nearly eliminating the use of sulfuric acid (H2SO4) and significantly reducing the use of hydrogen peroxide (H2O2). STMICROELECTRONICS PROCESSES ONE MILLION WAFERS USING FSI ... by EDP Weekly's IT Monitor This foundry currently employs the ANTARES system for various FEOL and BEOL particle removal processes, and with this order is adding capacity for more in-line parametric test clean up at the 65 and 90nm technology generations. FSI International Receives Multiple Follow-on ANTARES(R) Orders from ... by Business Wire More results

? References in periodicals archive

This technology has allowed ST to convert from its use of conventional piranha-based chemistry to the more benign DIO3 chemistry in almost all FEOL resist stripping and post-ash residue removal steps, nearly eliminating the use of sulfuric acid (H2SO4) and significantly reducing the use of hydrogen peroxide (H2O2).

STMICROELECTRONICS PROCESSES ONE MILLION WAFERS USING FSI ... by EDP Weekly's IT Monitor

This foundry currently employs the ANTARES system for various FEOL and BEOL particle removal processes, and with this order is adding capacity for more in-line parametric test clean up at the 65 and 90nm technology generations.

FSI International Receives Multiple Follow-on ANTARES(R) Orders from ... by Business Wire

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FEOC
FEOD
FEOE
FEOFS
FEOG
FEOGA
FEOIA
FEOL
FEOM
FEOMA
FEONA
FEOP
FEORC
FEORP
FEOS

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