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FOUP

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AcronymDefinition
FOUPFront Opening Unified Pod
FOUPFriends of University Park (UK)
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The system can be optionally equipped with FOUP loaders and SEMI-compliant 300-mm automation software, for integration with fab automation systems.
RUDOLPH INTRODUCES WAFER-BOW/STRESS METROLOGY TOOL by Electro Manufacturing
Current products include the WT2000 bench top and WT3000 FOUP automated mapping tools with modules for the wafer mapping of microPCD lifetime, SPV diffusion length, Q-V gate dielectric properties and JPV implant sheet resistance.
Semilab Licenses Implant and Metal Thickness Metrology Technology ... by Business Wire
This results in significantly shorter and more predictable FOUP delivery times and dramatic improvements in throughput and tool utilization.
Asyst Launches Agile Automation(TM) by Business Wire
 
 
 
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