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FSIR |
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which makes FSIR (full spectrum infrared) systems for individual layer detection. The company will also show its Spectra-Beam FSIR technology with new on-line calibration tools for discrete layer measurement and control. A spectra Beam FSIR (Full Spectrum Infrared) sensor from Aeonic Systems is said to be able to measure substrates difficult or impossible to gauge using previous techniques. |
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