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FUSI |
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be: IMEC shows potential of FUSI for low-power applications and its extendibility to high performance -- Device performance meets ITRS for 45nm FUSI gate is regarded as a promising transition between current poly silicon gate electrodes and future dual work-function metal gates that require exotic materials and complicated processing. Diffusion-less Junctions and Super Halo Profiles for PMOS Transistors Formed by SPER and FUSI Gate in 45 nm Physical Gate Length Devices |
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