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GEM |
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and the SEMI Generic Equipment Model Standard (GEM). is the semiconductor industry's leader in enabling factory integration products that comply with Semiconductor Equipment and Materials International's (SEMI) Semiconductor Equipment Communications Standards (SECS) and the SEMI Generic Equipment Model Standard (GEM), as well as the new 300mm standards. Building on these core capabilities, GaSonics has designed the PEP to address manufacturing challenges with the inclusion of integrated standard mechanical interface (SMIF), generic equipment model (GEM) software and automatic guided vehicle (AGV) features to provide the most advanced capabilities achievable. |
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