HWCVDHot Wire Chemical Vapor Deposition
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On the other hand, the HWCVD has gained a good reputation in the synthesis of different metal oxide nanoparticles.
Subsequent to the construction of the HWCVD experimental setup, the synthesis of many metal oxides, specifically the MgO, nanoparticles was followed.
Shi's research involves the application of laser spectroscopic and laser ionization mass spectrometric techniques to study the important reactive intermediates in the process of HWCVD of silicon-containing films.