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Based on the industry's leading production-proven single wafer high current system, the VIISta 80, the VIISta HC is designed to deliver the highest productivity for low energy applications. Samsung's order is the latest in a series of wins for Axcelis' line of high current, low energy implanters, and extends the company's installed base of high current systems in the Asia Pacific region. The VIISta 810 medium current or VIISta 3000 high energy ion implanters coupled with the VIISta 80 high current system are utilized for through-gate implant (TGI) and through-spacer implant (TSI) manufacturing steps. |
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