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IRAD |
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TOKYO -- Tokyo Electron (TEL), a world leader in thermal processing systems, today announced that the company will release TELINDY IRad in April 2007 for high-volume manufacturing of advanced plasma-enhanced nitride films. The IRad system is based on the robust, production-proven design of the TELFORMULA(TM) variable-load-size reactor. The SDR-3000 IRAD package combines hardware and software development tools to help customers such as ORNL reduce their development time and risk," he added. |
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