(redirected from K-Effective)
KEFFK-Effective (Distribution Coefficient)
References in periodicals archive ?
Low k dielectric films that reduce line-to-line capacitance and allow interconnects to be built closer together with less risk of electrical signal leakage must be advanced to a k-effective of 2.
The result of several years of focused R&D activity and extensive field verification, the Axcelis ES3Lk is a new isotropic dry strip system that maintains the lowest k-effective value for integrated back-end-of-line (BEOL) dielectric stacks.