LEPECVDLow Energy Plasma Enhanced Chemical Vapor Deposition
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Unaxis Semiconductors, a leading supplier of plasma processing equipment for the worldwide semiconductor industry, today announced the official launch of the LEPECVD 300 Semiconductor Equipment Assessment (SEA) project after endorsement by the European Union.
The LEPECVD 300 program is the second joint project of ST Microelectronics and Unaxis on SiGe technology.
Process technologies include PVD, PECVD, UHV-CVD, LEPECVD, Etching (RIE, HDP, ICP) and RTP.