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LEPECVD

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AcronymDefinition
LEPECVDLow Energy Plasma Enhanced Chemical Vapor Deposition


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? References in periodicals archive
Process technologies include PVD, PECVD, UHV-CVD, LEPC, LEPECVD, etching (RIE, ICP) and RTP.
TU Berlin Receives Unaxis DSE System for MEMS by Business Wire
Process technologies include PVD, PECVD, UHV-CVD, LEPC, LEPECVD, etching (RIE, ICP) and RTP.
Unaxis Semiconductors Introduces the VERSALINE, its Newest Deposition ... by Business Wire
Process technologies include PVD, PECVD, UHV-CVD, LEPC, LEPECVD, etching (RIE, HDP, ICP) and RTP.
Unaxis Semiconductors Launches Next-Generation 65 nm ICP Dry Etch ... by Business Wire
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