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LOCOS |
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Typical applications include nitride etch, contact/via etch, photoresist descum, LOCOS nitride etch, zero layer etch, backside etch, non-critical polysilicon etch and titanium/tantalum alloy etch. Typical applications include nitride etch, contact/via etch, photoresist descum, LOCOS nitride etch, zero layer etch, backside etch, isotropic oxide etch, non-critical polysilicon etch and titanium/tantalum alloy etch. Typical applications include nitride etch, contact/via etch, photoresist descum, LOCOS nitride etch, zero layer etch, backside etch, isotropic oxide etch, non-critical polysilicon etch and titanium/tantalum alloy etch. |
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