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LPCVD

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AcronymDefinition
LPCVDLow Pressure Chemical Vapor Deposition


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? References in periodicals archive
IMI's SiFusion(TM) boats will be used in LPCVD processes for the manufacture of advanced memory chips.
Hynix Semiconductor, Inc. Selects Integrated Materials SiFusion(TM) ... by Business Wire
In addition to the oxide anneal environment, SiFusion is also suited to other high temperature and LPCVD semiconductor manufacturing processes.
SiFusion Furnaceware Gains Tool of Record Status for Fab's Oxide ... by Business Wire
In conjunction with injectors and boats, SiFusion liners are an essential element of the semiconductor LPCVD furnace.
Integrated Materials Offers Poly Silicon Furnace Liner; SiFusion ... by Business Wire
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