MERIE

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Acronym	Definition
MERIE	Magnetically Enhanced Reactive Ion Etching

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? References in periodicals archive
TOKYO -- Tokyo Electron (TEL), the world leader in dielectric etch, announced today the release of UNITY(R) LS, equipped with TEL's award-winning DRM chamber, a MERIE style capacitively coupled plasma source. TEL Announces the Release of UNITY(R) LS for the Used Equipment Market by Business Wire The company currently offers two plasma source technologies, MERIE and dual high frequency plasma etching. TEL Delivers 500th Etch System in the U.S by Business Wire Built on the company's proven MERIE (magnetically enhanced reactive ion etch) technology and featuring a new design, the HART chamber is capable of etching uniform trenches with critical dimensions (CDs) measuring less than 80nm. Applied Materials Introduces Deep Trench Etch Technology for Sub-100 ... by Business Wire More results

? References in periodicals archive

TOKYO -- Tokyo Electron (TEL), the world leader in dielectric etch, announced today the release of UNITY(R) LS, equipped with TEL's award-winning DRM chamber, a MERIE style capacitively coupled plasma source.

TEL Announces the Release of UNITY(R) LS for the Used Equipment Market by Business Wire

The company currently offers two plasma source technologies, MERIE and dual high frequency plasma etching.

TEL Delivers 500th Etch System in the U.S by Business Wire

Built on the company's proven MERIE (magnetically enhanced reactive ion etch) technology and featuring a new design, the HART chamber is capable of etching uniform trenches with critical dimensions (CDs) measuring less than 80nm.

Applied Materials Introduces Deep Trench Etch Technology for Sub-100 ... by Business Wire

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MERGS
MERHAB
MERHCF
MERI
MERIA
MERIC
MERID
MERIE
MERIG
MERIL
MERIMIS
MERIN
MERINT
MERIP
MERIPH

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