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MOCVD

   Also found in: Encyclopedia 0.01 sec.
AcronymDefinition
MOCVDMetallo Organic Chemical Vapor Deposition
MOCVDMetal Oxide Chemical Vapor Deposition
MOCVDMetal-Organic Chemical Vapor Decompression


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The new process technology enables the use of four-inch epitaxial wafers with high quality, which is not possible with the conventional MOCVD process.
The study did reveal, in one sample set grown by MOCVD by an outside laboratory, unintentional fluctuations in the epilayer composition during growth (as confirmed by SIMS analysis), which increased t he oxidation rate.
 
 
 
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