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023 MHz signal created by dividing the master oscillator frequency by a factor of ten. A major advancement for the industry, the XLR enhances Cymer's flagship dual-chamber Master Oscillator Power Amplifier (MOPA) platform with groundbreaking Recirculating Ring Technology. The XLA 300 is Cymer's fourth-generation light source built on the production-proven Master Oscillator Power Amplifier ( |
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