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Early results obtained by Fundamental Material Research Institute, a subcontractor of Carl Zeiss in the field of high-reflectivity multi-layer coatings, are already comparable to cutting-edge results demonstrated and published in other EUVL programmes. The project will change the situation of great product variety and small production scale in Guangzhou Synthetic Material Research Institute and promote the development of its technology and operation. Major research results included GM 617 acetic acid variety and GM 622 and GM 631 alcohol varieties developed by Chengdu Organosilicon Research Center, WJM-10 acetic acid variety and YD 863 and YD 865 ketoxime varieties developed by Wuxi Building Material Research Institute, and single-component MF 881 alcohol variety and two-component MF 899 and MF 889 alcohol varieties developed by Zhengzhou Zhongyuan Applied Technology Research Institute. |
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