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The combination of high productivity, excellent dose control and low contamination levels have made the VIISta 810 series tools the market leader for medium current ion implant applications," said Ernest Godshalk, Varian Semiconductor's president and chief operating officer. Our continuous improvement processes and upgrade programs have allowed our customers to extend their return on investment and enabled the E-Series tools to lead medium current ion implant technology for over a decade. Most recently, he served as product line marketing manager for Axcelis' High Energy and Medium Current ion implant product lines. |
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