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They found that, contrary to the expectations of some device manufacturers, the oxidation rate did not depend on whether the initial layers were grown by molecular beam epitaxy or metalorganic chemical vapor deposition (MOCVD), the two methods most commonly used by the industry. To make their VCSEL, he and Lott used metalorganic vapor phase epitaxy, a technique for stacking perfect crystalline layers into a semiconductor "sandwich. GE also provides pyrolytic boron nitride (PBN) crucibles, shapes, and various coatings for molecular beam epitaxy (MBE) and metalorganic epitaxial chemical vapor deposition (MOCVD) equipment. |
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