(redirected from Micro-Opto-Electro-Mechanical)
References in periodicals archive ?
It can be foreseen that micro-opto-electro-mechanical accelerometers will play a significant role in the applications in medium and high precision inertial field in the future.
Incredibly small and extremely reliable, these devices called micro-opto-electro-mechanical systems (MOEMS) integrate optical, electrical and mechanical elements in a package no bigger than a microchip.
The award will fund the development of a manufacturing infrastructure for commercialization of Micro-Opto-Electro-Mechanical Systems (MOEMS).