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NF3 |
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We're looking forward to showing FPD Taiwan visitors this exciting addition to our product line," Hodgson said, "and demonstrating how this high- flow system reduces chamber cleaning cost of ownership versus NF3 (nitrogen trifluoride) for the large scale cleaning applications used in the LCD industry. NF3 is used in a variety of semiconductor manufacturing process steps and is classed as a hazardous material. The Producer SE also offers a new low-flow Remote Clean(TM) system that reduces NF3 gas usage by up to 40 percent over the company's original Remote Clean technology. |
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