PACVD

AcronymDefinition
PACVDPlasma-Assisted Chemical Vapor Deposition
References in periodicals archive ?
These advanced coatings are developed through proprietary bath chemistries and new vacuum-chamber technologies that use PVD, CVD, and PACVD.
In addition, the company has just completed the first phase of new investment in new PVD and PACVD processes, valued at more than [pounds sterling]1 million, to expand facilities to meet the needs of the aerospace, biomedical and high end automotive engineering businesses.
Hot filament-assisted CVD and PACVD methods, however, provide greater control over deposition temperature, purity, microstructure, and orientation.
Elaborating on the research objectives, he said, "Today, methods such as CVD, PACVD, and PVD are used for deposition of nano-sized titanium nitride.