PEALDPlasma-Enhanced Atomic Layer Deposition
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According to the company, its PEALD systems will be installed in several facilities in Asia.
In addition ASM said it has qualified a new oxide application for an advanced PEALD SiO layer that targets manufacturing at the 2X nm node and below and which is expected to enter volume production later this year.
The system will comprise the PEALD System, precursor storage and delivery system, material capabilities, software and support.