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PECVD

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AcronymDefinition
PECVDPlasma-Enhanced Chemical Vapor Deposition


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The new process, which uses radio-frequency energy to generate the plasma, costs less than a competitive PECVD system that uses microwave energy, according to William Liggett, Nano Coating's president and CEO.
TFT-LCD = thin film transistor liquid crystal display; PVD = physical vapor deposition; PECVD = plasma-enhanced chemical vapor deposition; PV = photovoltaic Photos/Multimedia Gallery Available: http://www.
Some specific topics covered include the role of arginine as a complexing agent in copper CMP, the effect of copper migration in a field-induced dielectric failure, and the formation of air gap structures using PECVD.
 
 
 
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