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PERR

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AcronymDefinition
PERRPre-Environmental Readiness Review


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With the introduction of the Iridia last month, GaSonics furthered its ability to address the most advanced PERR clean steps in addition to removal of the resist itself, both of which have increased in complexity with the introduction of high-dose and high-energy implant techniques.
GaSonics Announces Multi-System Order from Lucent Technologies; New ... by Business Wire
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