PETEOS

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Acronym	Definition
PETEOS	Plasma Enhanced Tetraethylorthosilicate

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? References in periodicals archive
A M0RI(TM) chamber was used to etch 30nm contact holes as deep as 633nm in PETEOS oxide. Trikon Etches World's Smallest Contact Holes Using M0RI Etcher by Business Wire The DxZ chamber performs an in situ integrated process sequence of PETEOS and SACVD films -- uniquely combining the gap-fill SACVD and cap layer PECVD in a simple, one-step, one chamber deposition process. Applied Materials Introduces High Productivity CVD Solution For 0.5 ... by Business Wire The new system uses a proprietary multiple-station architecture for continuous processing of several wafers at one time, enabling exceptionally high throughput of up to 60 wafers per hour (6000A blanket PETEOS film removal), a 3-fold increase over the CMP market's current leading supplier. Applied Materials Launches into Fast-Growing CMP Market with ... by Business Wire More results

? References in periodicals archive

A M0RI(TM) chamber was used to etch 30nm contact holes as deep as 633nm in PETEOS oxide.

Trikon Etches World's Smallest Contact Holes Using M0RI Etcher by Business Wire

The DxZ chamber performs an in situ integrated process sequence of PETEOS and SACVD films -- uniquely combining the gap-fill SACVD and cap layer PECVD in a simple, one-step, one chamber deposition process.

Applied Materials Introduces High Productivity CVD Solution For 0.5 ... by Business Wire

The new system uses a proprietary multiple-station architecture for continuous processing of several wafers at one time, enabling exceptionally high throughput of up to 60 wafers per hour (6000A blanket PETEOS film removal), a 3-fold increase over the CMP market's current leading supplier.

Applied Materials Launches into Fast-Growing CMP Market with ... by Business Wire

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PETAR
PETC
PETCORE
PETD
PETDR
PETE
PETEF
PETEOS
PETER
PETF
PETG
PETH
PETHEMA
PETHS
PETI

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