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For example, a certain amount of smoothing has been observed during reactive ion etching of Cr lines on Si (11). The TSVs (Through Silicon Vias) -- electrically isolated interconnections through the silicon, which requires laser or deep reactive ion etching (DRIE) to create through vias. Doing the TSVs (Through Silicon Vias) -- electrically isolated interconnections through the silicon, which requires laser or deep reactive ion etching (DRIE) to create through vias. |
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