SACVD

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Acronym	Definition
SACVD	Sub-Atmospheric Pressure Chemical Vapor Deposition

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? References in periodicals archive
As feature sizes reduce and aspect ratios increase, HDP and SACVD technologies are becoming gap-fill limited, reducing or eliminating the value they can offer when used for applications such as pre-metal dielectric and inter-metal dielectric," said David Butler, Trikon Technologies director of marketing. Major DRAM Manufacturers Evaluate Trikon's Flowfill for Emerging ... by Business Wire The Producer system is used for PECVD (plasma enhanced CVD) and SACVD (sub-atmospheric CVD) applications to deposit silicon dioxide, silicon nitride, dielectric ARC (anti-reflection coatings), and low-k films for copper-based chip manufacturing. Applied Materials' 100th Producer 300mm CVD System Shipped to TSMC; ... by Business Wire The Producer is also used for SACVD (sub-atmospheric chemical vapor deposition) applications to deposit BPSG, USG and PSG films for fabricating transistors. Applied Materials Ships Milestone 500th Producer CVD System; ... by Business Wire More results

? References in periodicals archive

As feature sizes reduce and aspect ratios increase, HDP and SACVD technologies are becoming gap-fill limited, reducing or eliminating the value they can offer when used for applications such as pre-metal dielectric and inter-metal dielectric," said David Butler, Trikon Technologies director of marketing.

Major DRAM Manufacturers Evaluate Trikon's Flowfill for Emerging ... by Business Wire

The Producer system is used for PECVD (plasma enhanced CVD) and SACVD (sub-atmospheric CVD) applications to deposit silicon dioxide, silicon nitride, dielectric ARC (anti-reflection coatings), and low-k films for copper-based chip manufacturing.

Applied Materials' 100th Producer 300mm CVD System Shipped to TSMC; ... by Business Wire

The Producer is also used for SACVD (sub-atmospheric chemical vapor deposition) applications to deposit BPSG, USG and PSG films for fabricating transistors.

Applied Materials Ships Milestone 500th Producer CVD System; ... by Business Wire

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SACU
SACUA
SACUBO
SACUPA
SACUS
SACV
SACVB
SACVD
SACVEN
SACVI
SACVSD
SACW
SACWA
SACWARNS
SACWG

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