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SACVD

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AcronymDefinition
SACVDSub-Atmospheric Pressure Chemical Vapor Deposition


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Applied has led the industry in providing the most advanced HDP-CVD3 and SACVD gap-fill technologies over the last 14 years to meet customers' most stringent process demands," said Bill McClintock, vice president and general manager of Applied's Dielectric Systems and CMP business unit.
As feature sizes reduce and aspect ratios increase, HDP and SACVD technologies are becoming gap-fill limited, reducing or eliminating the value they can offer when used for applications such as pre-metal dielectric and inter-metal dielectric," said David Butler, Trikon Technologies director of marketing.
The Producer system is used for PECVD (plasma enhanced CVD) and SACVD (sub-atmospheric CVD) applications to deposit silicon dioxide, silicon nitride, dielectric ARC (anti-reflection coatings), and low-k films for copper-based chip manufacturing.
 
 
 
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