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Fleming, who has previously managed lithography programs at SVGL and IBM, then went on to describe how PXL technology has been brought to the point of producing world-class millimeter wave integrated circuits (MMIC devices). Advanced lithography systems from Canon, SVGL, and Ultratech Stepper are a perfect fit for this phase shifting technology. Preliminary work is underway at SVGL and International SEMATECH to test the possibilities of using light sources with wavelengths of 157 nm for resolutions of 90 nm and below. |
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