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To reach the quality and device-performance requirements set for next-generation integrated circuits, chipmakers say they need a threefold improvement in their ability to measure and control temperature during single-wafer processing. Maydan led the development of the Precision 5000(R), a revolutionary single-wafer processing system that the Smithsonian Institution includes as part of its collection of technologies that have helped shape society and the modern world. Cleaning applications in the 300 mm era are trending toward single-wafer processing, and we believe Semitool is well positioned to provide production solutions. |
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