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TEOS |
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A lower level of incorporated Si compared to Zr in hybrid ACPs suggests that TEOS was most likely bound on the surface of the panicles and, therefore, was more easily removed during filtering and washing of the freshly precipitated solids. With a 1:1 selectivity of copper to low-k dielectric and a high TEOS rate, the non-selective alkaline LK393c4 slurry is ideal for low-k integration schemes. is offering a cost saving alternative of using reclaimed TEOS or thermal oxide dummy wafers for CMP(a) tools retaining ring break-ins and tool startup qualifications after idle time. |
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