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TOF-SIMS

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AcronymDefinition
TOF-SIMSTime-Of-Flight Secondary Ion Mass Spectroscopy (manufacturing measurement/analysis tool)


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? References in periodicals archive
Analytical capabilities include, SIMS, TOF-SIMS, TXRF, XPS, AES, AFM-STM and SRP.
] Alan Galuska and Eric Halverson, "Surface characterization using XPS and TOF-SIMS," Exxon Chemical Company internal report, 1992.
The team also has access to some unique facilities at the University of Toronto including TOF-SIMS, XPS, FE-SEM, and XRD - these additional facilities cost many millions of dollars.
 
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