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TRXRF

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AcronymDefinition
TRXRFTotal Reflection X-Ray Fluorescence


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Because TRXRF can accurately quantify trace elements in a variety of materials, such as semiconductors, much more sensitively than the more popular WDXRF and EDXRF systems.
In TRXRF an X-ray beam grazes the silicon's surface at a low enough angle so the beam is reflected after penetrating only a few atoms deep into the wafer.
 
 
 
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