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Thanks to high-k process innovations, this CMOS platform combines a wide threshold voltage range with high carrier mobility, allowing it to provide the low standby power consumption required by mobile devices together with the high performance required by high-speed logic applications, all with the same transistor structure. Overcoming problems caused by inevitable variations in threshold voltage The pMOS and nMOS materials were successfully integrated into highly scaled CMOS devices that showed low threshold voltage (Vt) similar to conventional polysilicon/SiO2 devices, and ultrathin equivalent oxide thickness (EOT) in the range of 1. |
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